Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy

Lift-mode electrostatic force microscopy (EFM) is one of the most convenient imaging modes to study the local dielectric properties of non-planar samples. Here we present the quantitative analysis of this imaging mode. We introduce a method to quantify and subtract the topographic crosstalk from the lift-mode EFM images, and a 3D numerical approach that allows for extracting the local dielectric constant with nanoscale spatial resolution free from topographic artifacts. We demonstrate this procedure by measuring the dielectric properties of micropatterned SiO 2 pillars and of single bacteria cells, thus illustrating the wide applicability of our approach from materials science to biology.

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